1. hafta |
Introduction and Motivation
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2. hafta |
Cleanroom Environment
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3. hafta |
Safety and Processing Overview |
4. hafta |
Micrometrology |
5. hafta |
Materials Characterization |
6. hafta |
Silicon: Material Properties, Crystal Structure |
7. hafta |
Silicon: Growth, Wafers |
8. hafta |
Thin-Film Materials and Processes: Metallic Thin Films, Oxide and Nitride Thin Films |
9. hafta |
Thin-Film Materials and Processes: Polymer Films, Stresses, Coverage
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10. hafta |
Pattern Generation and Optical Lithography: Photomasks as Tools, Lithography Process Flow
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11. hafta |
Pattern Generation and Optical Lithography: Resist Application, Alignment and Overlay, Exposure
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12. hafta |
Etching: Etching Profiles, Anisotropic Wet Etching, Wet Etching
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13. hafta |
Etching: Plasma Etching (RIE), Isotropic Dry Etching, Ion Beam Etching
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14. hafta |
Presentations
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