Akademik Dersler - Tanıtım


Code - Course Title	NANO307 - Fundamentals of Micro and Nanofabrication
Course Type	Elective Courses
Language of Instruction	Türkçe
Laboratory + Practice	2+0
ECTS	3.0
Course Instructor(s)	DOKTOR ÖĞRETİM ÜYESİ BURCU ARPAPAY
Mode of Delivery	Face to face
Prerequisites	-
Courses Recomended	-
Required or Recommended Resources	-
Recommended Reading List	Sami Franssila, (2004), Introduction to Microfabrication, John Wiley&Sons;, Ltd; Andrew Sarangan, (2017), Nanofabrication Principles to Laboratory Practice, CRC Press Taylor&Francis; Group; Zheng Cui, (2017), Nanofabrication Principles, Capabilities and Limits, Springer
Assessment methods and criteria	Homework, Exam
Work Placement	-
Sustainability Development Goals	Health and Quality of Life , Quality Education , Clean Water and Sanitation , Accessible and Clean Energy , Industry, Innovation and Infrastructure , Responsible Production and Consumption , Climate Action

Weeks	Topics
Week - 1	Introduction to micro/nanofabrication
Week - 2	Cleanroom
Week - 3	Mask design for device fabrication
Week - 4	Photolithography
Week - 5	Steps in photolithograpy
Week - 6	Nanolithograpy
Week - 7	Nanolithograpy
Week - 8	Wet Etching
Week - 9	Dry Etching
Week - 10	Physical vapor deposition techniques
Week - 11	Physical vapor deposition techniques
Week - 12	Chemical vapor deposition techniques
Week - 13	Wire Bonding
Week - 14	Fabrication processes for semiconductor devices

Assessment Method and Passing Requirements
	Quamtity	Percentage (%)
Toplam (%)		0