Akademik Dersler - Tanıtım


Code - Course Title	İTN522 - Introduction to Micro and Nano Fabrication
Course Type	Elective Courses
Language of Instruction	İngilizce
Laboratory + Practice	3+0
ECTS	7.5
Course Instructor(s)	PROFESÖR DOKTOR FERİDUN AY
Mode of Delivery	Face to face
Prerequisites	None
Courses Recomended	There is no recommended optional program component for this course.
Required or Recommended Resources	1) S. Franssila, “Introduction to Microfabrication”, 2nd Ed., Wiley, 2010;2) M.J. Madou, “Fundamentals of Microfabrication: The Science of Miniaturization”, 3rd Ed., CRC Press, 2011;
Recommended Reading List	3) R. C. Jaeger, “Introduction to Microelectronic Fabrication” (Vol. V of the Modular Series on Solid State Devices), 2nd Ed., Prentice Hall, 2002;
Assessment methods and criteria	One midterm exam, one final exam, homework assignments, projects and presentations.
Work Placement	Not Applicable
Sustainability Development Goals

Weeks	Topics
Week - 1	Introduction and Motivation
Week - 2	Cleanroom Environment
Week - 3	Safety and Processing Overview
Week - 4	Micrometrology
Week - 5	Materials Characterization
Week - 6	Silicon: Material Properties, Crystal Structure
Week - 7	Silicon: Growth, Wafers
Week - 8	Thin-Film Materials and Processes: Metallic Thin Films, Oxide and Nitride Thin Films
Week - 9	Thin-Film Materials and Processes: Polymer Films, Stresses, Coverage
Week - 10	Pattern Generation and Optical Lithography: Photomasks as Tools, Lithography Process Flow
Week - 11	Pattern Generation and Optical Lithography: Resist Application, Alignment and Overlay, Exposure
Week - 12	Etching: Etching Profiles, Anisotropic Wet Etching, Wet Etching
Week - 13	Etching: Plasma Etching (RIE), Isotropic Dry Etching, Ion Beam Etching
Week - 14	Presentations

Assessment Method and Passing Requirements
	Quamtity	Percentage (%)
Toplam (%)		0