Akademik Dersler - Tanıtım


Code - Course Title	MKM422 - Micro/ Nanoscale Fabrication and Characterization
Course Type	Area Elective Courses
Language of Instruction	İngilizce
Laboratory + Practice	3+0
ECTS	5.0
Course Instructor(s)	DOÇENT ELİF BEGÜM ELÇİOĞLU
Mode of Delivery	The mode of delivery of this course is face-to-face or distance learning.
Prerequisites	There is no prerequisite or co-requisite for this course.
Courses Recomended
Recommended Reading List	C. Liu, Foundations of MEMS, 2nd Ed., 2012, Pearson Education Limited.
Assessment methods and criteria	1 Midterm, 1 Homework, 1 Final
Work Placement	N/A
Sustainability Development Goals

Weeks	Topics
Week - 1	Introduction to nanomaterials and nanotechnology
Week - 2	Materials used in MEMS processes (e.g., wafers, resists) and selection parameters
Week - 3	Clean room principles, thin film deposition techniques
Week - 4	Thin film deposition, epitaxial growth, and oxidation processes
Week - 5	Pattern formation in micro/nanoscale via lithography
Week - 6	Doping
Week - 7	Wet etching
Week - 8	Dry etching
Week - 9	Wafer dicing, bonding techniques and sensitivities
Week - 10	Wafer dicing, bonding techniques and sensitivities
Week - 11	Characterization techniques: imaging, surface evaluation and related parameters
Week - 12	Characterization techniques: determination of atomic and crystallographic structure
Week - 13	Key factors in determining suitable MEMS fabrication and characterization techniques
Week - 14	MEMS based device examples, working principles, application areas

Assessment Method and Passing Requirements
	Quamtity	Percentage (%)
1.Midterm Exam	1	35
Homework	1	25
Final Exam	1	40
Toplam (%)		100