Akademik Dersler - Tanıtım


Code - Course Title	EEM621 - Nano and Micro-Fabrication Techniques
Course Type	Elective Courses
Language of Instruction	İngilizce
Laboratory + Practice	3+0
ECTS	7.5
Course Instructor(s)	PROFESÖR DOKTOR FERİDUN AY
Mode of Delivery	Face to face
Prerequisites	None
Courses Recomended	None
Required or Recommended Resources	1) S. Franssila, “Introduction to Microfabrication”, 2nd Ed., Wiley, 2010;2) M.J. Madou, “Fundamentals of Microfabrication: The Science of Miniaturization”, 3rd Ed., CRC Press, 2011;2) S. Wolf and R. N. Tauber, “Silicon Processing for the VLSI Era, Volume 1: Process Technology”, 2nd Ed., Lattice press, 1990;3) R. C. Jaeger, “Introduction to Microelectronic Fabrication” (Vol. V of the Modular Series on Solid State Devices), 2nd Ed., Prentice Hall, 2002;4) S. Wolf, “Microchip Manufacturing”, Lattice Press, 2004.
Recommended Reading List	1) B. G. Streetman “Solid State Electronic Devices”, Prentice-Hall, 2006,2) S.M. Sze, “Semiconductor Devices-Physics and Technology”, Wiley, 1985.
Assessment methods and criteria	One midterm exam, one final exam, homework assignments and presentations.
Work Placement	Not Applicable
Sustainability Development Goals

Weeks	Topics
Week - 1	History of Integrated Circuits: Introduction and Motivation
Week - 2	Cleanroom Environment, Safety and Processing Overview
Week - 3	Micrometrology and Materials Characterization
Week - 4	Silicon: Material Properties, Crystal Structure, Growth, Wafers
Week - 5	Silicon: Material Properties, Crystal Structure, Growth, Wafers
Week - 6	Thin-Film Materials and Processes: Metallic Thin Films, Oxide and Nitride Thin Films, Polymer Films, Stresses, Coverage
Week - 7	Advanced Thin Films: Surfaces and Interfaces, Alloys and Doped Films, Multilayer Films, Simulation of Deposition, Thickness Limits of Thin Films
Week - 8	Advanced Thin Films: Surfaces and Interfaces, Alloys and Doped Films, Multilayer Films, Simulation of Deposition, Thickness Limits of Thin Films
Week - 9	Pattern Generation and Optical Lithography: Photomasks as Tools, Lithography Process Flow, Resist Application, Alignment and Overlay, Exposure
Week - 10	Nano and Micro-fabrication Equipment
Week - 11	Nano and Micro-fabrication Equipment
Week - 12	Presentations
Week - 13	Presentations
Week - 14	Presentations

Assessment Method and Passing Requirements
	Quamtity	Percentage (%)
1.Midterm Exam	1	30
Homework	1	30
Final Exam	1	40
Toplam (%)		100